Home


Products


News


About


Employment


Contact


Categories

Spare Parts (47881)
Support Equipment (57)
Test & Assembly (0)
Wafer Processing (1)



Manufacturers





Quick Search

Use keywords, part numbers, or partial terms to find the product you are looking for.




Narrow Results

ALL Wafer Processing
APPLIED MATERIALS




Information

Terms & Conditions
Privacy Notice
Conditions of Use
XLT Home Page



Wafer Processing 1 - 1 of 1 items found

APPLIED MATERIALS P5000
Applied Materials Mark II P5000 DxZ PECVD System Configured for 150mm Si and SiO2 wafers System is refurbished to meet or exceed OEM specs.
Mark II Mainframe
- Mark II Standard Mainframe
- Standard Remote Frame
- Bolt Down Loadlock Lid
- 208VAC/60Hz/3 Phase
- SVGA Monitor (qty. 2)
- Phase III Robotics w/ I/O Wafer Sensor
- 8 Slot Storage Elevator
- 21 Slot VME Rack
Chamber A: PECVD DxZ
- 150mm Process Kit (To Be Determined)
- DxZ Chamber Body & Lid
- AE RFG-2000 RF Generator w/ MFA
- DxZ Heater
- Direct-Drive Dual Spring Throttle Valve
Chamber B: PECVD DxZ
- 150mm Process Kit (To Be Determined)
- DxZ Chamber Body & Lid
- AE RFG-2000 Rf Generator w/ MFA
- DxZ Heater
- Direct-Drive Dual Spring Throttle Valve
Gas Panel
- 28 Slot capability
- Configured for duplicate gases in Chambers A & B
- New gas lines as needed, Nupro valves, in-line & POU filters
- Refurbished MFCs (see below list for each chamber)
o SiH4, PH3, N2O, NH3, N2, H2, CH4, C2F6
Remote Ancillary Support Hardware
- AMAT-0 Heat Exchanger
- 25 ft. Signal Interface Package
- Minicontroller & Cabling
Installation (included):
- Tier 1 (Electrical/Mechanical)
- Tier 2 (150mm CVD Process Qual.) (QTY: 1)





Quote Cart
Cart is empty



Copyright 2008 XL Technology, LLC
Legal  ::  Privacy Policy

PL 1   PL 2   PL 3